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Status of Standard is Unknown
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BS ISO 20146 - VACUUM TECHNOLOGY - VACUUM GAUGES - SPECIFICATIONS, CALIBRATION AND MEASUREMENT UNCERTAINTIES FOR CAPACITANCE DIAPHRAGM GAUGE
Hardcopy , PDF
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of capacitance diaphragm gauge
6 Specifications for capacitance diaphragm
gauge
7 Additional (Optional) specifications for
capacitance diaphragm gauge
8 Calibration
9 Measurement uncertainty at use
Annex A (informative) - Compensation of
thermal transpiration effect
Bibliography
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