17/30349154 DC : 0
NA
Status of Standard is Unknown
BS ISO 20146 - VACUUM TECHNOLOGY - VACUUM GAUGES - SPECIFICATIONS, CALIBRATION AND MEASUREMENT UNCERTAINTIES FOR CAPACITANCE DIAPHRAGM GAUGE
Hardcopy , PDF
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of capacitance diaphragm gauge
6 Specifications for capacitance diaphragm
gauge
7 Additional (Optional) specifications for
capacitance diaphragm gauge
8 Calibration
9 Measurement uncertainty at use
Annex A (informative) - Compensation of
thermal transpiration effect
Bibliography
BS ISO 20146.
Committee |
MCE/8/-/4
|
DocumentType |
Draft
|
Pages |
24
|
PublisherName |
British Standards Institution
|
Status |
NA
|
ISO 3567:2011 | Vacuum gauges — Calibration by direct comparison with a reference gauge |
ISO 3529-3:2014 | Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges |
ISO/IEC Guide 99:2007 | International vocabulary of metrology Basic and general concepts and associated terms (VIM) |
ISO 3529-1:1981 | Vacuum technology — Vocabulary — Part 1: General terms |
ISO 27893:2011 | Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge |
IEC 60050-300:2001 | International Electrotechnical Vocabulary (IEV) - Part 300: Electrical and electronic measurements and measuring instruments - Part 311: General terms relating to measurements - Part 312: General terms relating to electrical measurements - Part 313: Types of electrical measuring instruments - Part 314: Specific terms according to the type of instrument |
ISO/IEC Guide 98-3:2008 | Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) |
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