This International Standard describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.
It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.
NOTE Any individual standard for a test material will have to specify a scope of a thickness of the surface layer as well as analyte elements, and include results of interlaboratory tests for validation of the methods.