SEMI E2 : 93(R1999)
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
SPECIFICATIONS FOR QUARTZ AND HIGH TEMPERATURE WAFER CARRIERS
01-11-2003
12-01-2013
The main document covers the dimensional requirements for high temperature and quartz wafer carriers for use in processing wafers. The compatibility of automated wafer processing equipment and most wafer carriers is covered. These standards are intended to encourage the production of suitable equipment and the interchangeability of wafer carriers. Subordinate Documents include: E2.2 (200mm Quartz & High Temperature Wafer Carriers); E2.3 (100 mm Quartz & High Temperature Water Carriers); E2.4 (125 mm Quartz & High Temperature Water Carriers); E2.5 (150 mm Quartz & High Temperature Water Carriers).
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