ASME MFC 21.1 : 1900
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
MEASUREMENT OF GAS FLOW BY MEANS OF CAPILLARY TUBE THERMAL MASS FLOWMETERS AND MASS FLOW CONTROLLERS
Hardcopy , PDF
27-08-2021
English
Important note : Users cannot be edited or removed once added to your Multi user PDF.
Foreword
Committee Roster
Correspondence With the MFC Committee
1 Scope
2 Terminology, Symbols, and References
3 General Description
4 Performance and Operating Specifications
5 Principle of Operation
6 Standard Volumetric Flow Rate
7 Conversion From One Gas to Another
8 Best Practices
Mandatory Appendix
I - Gas Flow Calibration
Nonmandatory Appendices
A - Energy Equation for the Gas Flowing in the
Sensor Tube
B - Bibliography
Describes common terminology and provides guidelines for the quality, description, principle of operation, selection, operation, installation, and flow calibration of capillary tube thermal mass flowmeters and mass flow controllers for the measurement and control of the mass flow rate of gases.
| DocumentType |
Standard
|
| Pages |
38
|
| PublisherName |
American Society of Mechanical Engineers
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E56 : 2017 | TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEADBAND OF THERMAL MASS FLOW CONTROLLERS |
| SEMI E69 : 1998(R2013) | TEST METHOD FOR DETERMINING REPRODUCIBILITY AND ZERO DRIFT FOR THERMAL MASS FLOW CONTROLLERS |
| SEMI E12 : 2013 | GUIDE FOR STANDARDIZED PRESSURE, TEMPERATURE, DENSITY, AND FLOW UNITS USED IN MASS FLOW METERS AND MASS FLOW CONTROLLERS |
| ISO/IEC Guide 99:2007 | International vocabulary of metrology Basic and general concepts and associated terms (VIM) |
| SEMI E52 : 2013 | PRACTICE FOR REFERENCING GASES, GAS MIXTURES, AND VAPORIZABLE MATERIALS USED IN DIGITAL MASS FLOW CONTROLLERS |
| SEMI E29 : 2010(R2017) | TERMINOLOGY FOR THE CALIBRATION OF MASS FLOW CONTROLLERS AND MASS FLOW METERS |
| SEMI E77 : 2004(R2015) | TEST METHOD FOR CALCULATION OF CONVERSION FACTORS FOR A MASS FLOW CONTROLLER USING SURROGATE GASES |
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