Name: ASME MFC 21.1:2015(R2026) - Measurement of Gas Flow by Means of Capillary Tube Thermal Mass Flowmeters and Mass Flow Controllers
Brand: American Society of Mechanical Engineers

Measurement of Gas Flow by Means of Capillary Tube Thermal Mass Flowmeters and Mass Flow Controllers

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PDF

Language(s)

English

Published date

04-07-2026

Publisher

American Society of Mechanical Engineers

€35.90

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This Standard establishes common terminology and provides guidelines for the quality, description, principle of operation, selection, operation, installation, and flow calibration of capillary tube thermal mass flowmeters and mass flow controllers for the measurement and control of the mass flow rate of gases.

DocumentType	Standard
Pages	38
ProductNote	This standard also refers toSME MFC-21.2–2010, SEMI E12-0303,SEMI E12-0303,ASME/ANSI MFC-7M–1987,
PublisherName	American Society of Mechanical Engineers
Status	Current
Supersedes	ASME MFC 21.1 : 2015(R2020)

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ASME MFC 21.1:2015(R2026)

Measurement of Gas Flow by Means of Capillary Tube Thermal Mass Flowmeters and Mass Flow Controllers

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