ASTM E 1438 : 1991 : R1996
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Hardcopy , PDF
11-11-2014
English
15-09-1991
Important note : Users cannot be edited or removed once added to your Multi user PDF.| Committee |
E 42
|
| DocumentType |
Guide
|
| Pages |
2
|
| ProductNote |
Reconfirmed 1996
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| SupersededBy |
1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens.
1.2 This guide does not describe methods for the optimization of interface width or the optimization of depth resolution.
1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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