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ASTM E 1577 : 2011 : REDLINE

Current

Current

The latest, up-to-date edition.

Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis

Available format(s)

PDF

Language(s)

English

Published date

01-05-2011

CONTAINED IN VOL. 03.06, 2014 Describes the information needed to characterize ion beams used in surface analysis.

Committee
E 42
DevelopmentNote
Supersedes ASTM E 684. (01/2013)
DocumentType
Redline
Pages
3
PublisherName
American Society for Testing and Materials
Status
Current
Supersedes

1.1 This guide covers the information needed to characterize ion beams used in surface analysis.

1.2 This guide does not cover all information required to perform a sputter depth profile (see referenced documents), specify any properties of the specimen except its surface normal, and discuss the rationale for choosing a particular set of ion beam parameters (1,7). This guide does assume that the ion flux has a unique direction, that is, is an ion beam, rather than a wide spectrum of velocity vectors more typical of a plasma.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

ASTM E 1127 : 2008 : R2015 Standard Guide for Depth Profiling in Auger Electron Spectroscopy (Withdrawn 2024)
ASTM E 2735 : 2014 : REDLINE Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
ASTM E 1127 : 2008 Standard Guide for Depth Profiling in Auger Electron Spectroscopy
ASTM E 684 : 2004 Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces (Withdrawn 2012)

ASTM E 673 : 2003 Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

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