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ASTM E 1634 : 2002 : R2007

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Standard Guide for Performing Sputter Crater Depth Measurements

Available format(s)

Hardcopy , PDF

Superseded date

11-11-2014

Superseded by

ASTM E 1634 : 2011

Language(s)

English

Published date

01-06-2007

€59.22
Excluding VAT

Committee
E 42
DocumentType
Guide
Pages
3
ProductNote
Reconfirmed 2007
PublisherName
American Society for Testing and Materials
Status
Superseded
SupersededBy
Supersedes

1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

ASTM E 2735 : 2014 Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
ASTM E 1127 : 2008 : R2015 Standard Guide for Depth Profiling in Auger Electron Spectroscopy (Withdrawn 2024)

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