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ASTM E 1634 : 2011 : REDLINE

Current

Current

The latest, up-to-date edition.

Standard Guide for Performing Sputter Crater Depth Measurements

Available format(s)

PDF

Language(s)

English

Published date

01-11-2011

CONTAINED IN VOL. 03.06, 2015 Defines the preferred procedure for acquiring and post-processing of sputter crater depth measurements.

Committee
E 42
DocumentType
Redline
Pages
3
PublisherName
American Society for Testing and Materials
Status
Current

1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

ASTM E 2735 : 2014 : REDLINE Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
ASTM E 1127 : 2008 Standard Guide for Depth Profiling in Auger Electron Spectroscopy
ASTM E 1127 : 2008 : R2015 Standard Guide for Depth Profiling in Auger Electron Spectroscopy (Withdrawn 2024)

ASTM E 673 : 2003 Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

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