ASTM E 2444 : 2005
NA
Status of Standard is Unknown
Terminology Relating to Measurements Taken on Thin, Reflecting Films
Hardcopy , PDF
English
31-12-2010
Committee |
E 08
|
DocumentType |
Reference Material
|
Pages |
3
|
PublisherName |
American Society for Testing and Materials
|
Status |
NA
|
SupersededBy |
1.1 This standard consists of terms and definitions pertaining to measurements taken on thin, reflecting films, such as found in microelectromechanical systems (MEMS) materials. In particular, the terms are related to the standards in Section , which were generated by Committee E08 on Fatigue and Fracture. Terminology E 1823 Relating to Fatigue and Fracture Testing is applicable to this standard.
1.2 The terms are listed in alphabetical order.
ASTM E 2244 : 2011 : R2018 | Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023) |
ASTM E 2246 : 2011 : R2018 | Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023) |
ASTM E 2245 : 2011 : R2018 | Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023) |
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