ASTM E 2734/E2734M : 2010
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Standard Specification for Dimensions of Knife-Edge Flanges
Hardcopy , PDF
01-09-2020
English
01-01-2010
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL. 03.06, 2018 Describes the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 10[5] Pa to 10[-11] Pa.
| Committee |
E 42
|
| DocumentType |
Standard
|
| Pages |
4
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| SupersededBy |
1.1 This standard specifies the dimensions of knife-edge style flanges and their associated gaskets used in vacuum systems for pressures ranging from 105 Pa to 10-11 Pa. Such flanges are widely used throughout vacuum technology applications in semiconductor processing tools, surface analysis systems, space simulation systems, and general research requiring vacuum.
1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
| ASTM E 673 : 2003 | Standard Terminology Relating to Surface Analysis (Withdrawn 2012) |
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