ASTM F 108 : 1988 : EDT 1
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Test Method for Resistivity of Silicon Epitaxial Layers by the Three-Probe Voltage Breakdown Method (Withdrawn 1993)
Hardcopy , PDF
21-08-2021
English
01-01-2014
CONTAINED IN VOL 10.05 1996 Measures electrical resistivity of silicon epitaxial layers with surface perfection suitable for semiconductor device fabrication deposited on single-crystal substrates of lower resistivity and same conductivity type.
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