ASTM F 108 : 1988 : EDT 1
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Test Method for Resistivity of Silicon Epitaxial Layers by the Three-Probe Voltage Breakdown Method (Withdrawn 1993)
Hardcopy , PDF
21-08-2021
English
01-01-2014
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL 10.05 1996 Measures electrical resistivity of silicon epitaxial layers with surface perfection suitable for semiconductor device fabrication deposited on single-crystal substrates of lower resistivity and same conductivity type.
| DocumentType |
Test Method
|
| Pages |
6
|
| ProductNote |
e1 NOTE-Figures 1,2,3, and 5 were editorially renumbered in August 1989.
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| Supersedes |
| ASTM E 177 : 2014 : REDLINE | Standard Practice for Use of the Terms Precision and Bias in ASTM Test Methods |
| ASTM F 95 : 1989 : R2000 | Standard Test Method for Thickness of Lightly Doped Silicon Epitaxial Layers on Heavily Doped Silicon Substrates Using an Infrared Dispersive Spectrophotometer (Withdrawn 2003) |
| ASTM D 1125 : 2014 : REDLINE | Standard Test Methods for Electrical Conductivity and Resistivity of Water (Withdrawn 2023) |
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