ASTM F 1239 : 2002
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Test Methods for Oxygen Precipitation Characterization of Silicon Wafers by Measurement of Interstitial Oxygen Reduction (Withdrawn 2003)
Hardcopy , PDF
05-11-2013
English
10-01-2002
CONTAINED IN VOL. 10.05, 2001 Covers complementary procedures for testing the oxygen precipitation characteristics of silicon wafers. May be used to compare qualitatively the precipitation characteristics of two or more groups of wafers.
Committee |
F 01
|
DocumentType |
Test Method
|
Pages |
6
|
PublisherName |
American Society for Testing and Materials
|
Status |
Withdrawn
|
Supersedes |
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 These test methods cover complementary procedures for testing the oxygen precipitation characteristics of silicon wafers. It is assumed that the precipitation characteristics are related to the amount of interstitial oxygen lost during specified thermal cycles.
1.2 These test methods may be used to compare qualitatively the precipitation characteristics of two or more groups of wafers.
1.3 These test methods may be applied to any - or -type, any orientation Czochralski silicon wafers whose thickness, resistivity, and surface finish are such as to permit the oxygen concentration to be determined by infrared absorption and whose oxygen concentration is such as to produce measurable oxygen loss.
1.4 These test methods are not suitable for determining the width or characteristics of a "denuded zone," a region near the surface of a wafer that is essentially free of oxide precipitates.
1.5 Because these test methods are destructive, suitable sampling techniques must be employed.
1.6 The values stated in SI units are regarded as standard.
1.7 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 8.
SEMI C28 : 2011 | SPECIFICATIONS FOR HYDROFLUORIC ACID |
SEMI C3.15 : 93(R1999) | STANDARD FOR NITROGEN (N2) IN CYLINDERS 99.9992% QUALITY |
SEMI C3.22 : 2000 | STANDARD FOR OXYGEN (O2), BULK LIQUID, 99.5% QUALITY |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.