ASTM F 1259 : 1989
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
View Superseded by
Guide for Design of Flat, Straight-Line Test Structures for Detecting Metallization Open-Circuit or Resistance-Increase Failure Due to Electromigration
11-11-2014
31-12-2010
CONTAINED IN VOL 10.04
| Committee |
F 30
|
| DocumentType |
Guide
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
| SupersededBy |
1.1 This guide covers recommended design features for test structures used in accelerated stress tests, as described in Test Method F1260, to characterize the failure distribution of interconnect metallizations that fail due to electromigration.
1.2 The guide is restricted to structures with a straight test line on a flat surface that are used to detect failures due to an open-circuit or a percent-increase in resistance of the test line.
1.3 This guide is not intended for test structures used to detect random defects in a metallization line.
1.4 Metallizations tested and characterized are those that are used in microelectronic circuits and devices.
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