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ASTM F 1367 : 1998

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Available format(s)

Hardcopy , PDF

Superseded date

11-11-2014

Language(s)

English

Published date

31-12-2010

CONTAINED IN VOL. 10.04, 2015 Defines sputtering targets fabricated from chromium metal.

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

Committee
F 01
DocumentType
Standard
Pages
2
ProductNote
Reconfirmed 1998
PublisherName
American Society for Testing and Materials
Status
Superseded
SupersededBy

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