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ASTM F 1367 : 1998 : R2011

ASTM F 1367 : 1998 : R2011

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

Standard Specification for Chromium Sputtering Targets for Thin Film Applications (Withdrawn 2020)

Available format(s)

Hardcopy , PDF

Withdrawn date

09-01-2020

Language(s)

English

Published date

01-06-2011

Publisher

American Society for Testing and Materials

CONTAINED IN VOL. 10.04, 2015 Defines sputtering targets fabricated from chromium metal.

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

Committee
F 01
DocumentType
Standard
Pages
2
ProductNote
Reconfirmed 2011
PublisherName
American Society for Testing and Materials
Status
Withdrawn
Supersedes

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PDF - English
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