ASTM F 1394 : 1992 : R2012
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
Hardcopy , PDF
03-12-2023
English
01-07-2012
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL. 10.04, 2015 Defines gas distribution system components meant for installation into a high-purity gas distribution system.
| Committee |
F 01
|
| DocumentType |
Test Method
|
| Pages |
27
|
| ProductNote |
Reconfirmed 2012
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
1.1This test method covers gas distribution system components intended for installation into a high-purity gas distribution system.
1.2This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm (1/4through 1/2-in.) size. For applications of this test method to larger valves, see the table in the appendix.
1.2.1Valves larger than 12.7 mm (1/2in.) can be tested by this methodology. The test stand must be sized accordingly. Components larger than 12.7 mm (1/2in.) should be tested while maintaining a Reynolds number of 20 000 to 21 000. This is the Reynolds number for 12.7-mm (1/2-in.) components tested at a velocity of 30.5 m/s (100 ft/s).
1.3.1This test method is applicable to total particle count greater than the minimum detection limit (MDL) of the condensation nucleus particle counter and does not consider classifying data into various size ranges.
1.3.1.1It is questionable whether significant data can be generated from nondynamic components (such as fittings and short lengths of tubing) to compare, with statistical significance, to the data generated from the spool piece. For this reason, this test method cannot reliably support comparisons between these types of components.
1.3.1.2If detection or classification of particles, or both, in the size range of laser particle counter (LPC) technology is of interest, an LPC can be utilized for testing components. Flow rates, test times, sampling apparatus, and data analysis outlined in this test method do not apply for use with an LPC. Because of these variations, data from CNCs are not comparable to data from LPCs.
1.3.2This test method specifies flow and mechanical stress conditions in excess of those considered typical. These conditions should not exceed those recommended by the manufacturer. Actual performance under normal operating conditions may vary.
1.3.3The test method is limited to nitrogen or clean dry air. Performance with other gases may vary.
1.4The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.
1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6, Hazards.
| FED-STD-209 Revision E:1992 | AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES |
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