ASTM F 1451 : 1992 : R1999
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Test Method for Measuring Sori on Silicon Wafers by Automated Noncontact Scanning (Withdrawn 2003)
Hardcopy , PDF
05-11-2013
English
31-12-2010
CONTAINED IN VOL. 10.05, 2001 Covers a non-contacting, nondestructive procedure to determine the sori of clean, dry semiconductor wafers. Measures sori of a wafer corrected for all mechanical forces applied during the test. Also includes a means of canceling gravity-induced deflection which could otherwise alter the shape of the wafer.
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