ASTM F 1569 : 1994 : R1999
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Guide for Generation of Consensus Reference Materials for Semiconductor Technology (Withdrawn 2003)
Hardcopy , PDF
05-11-2013
English
10-12-1999
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL. 10.05, 2001 Deals with procedures to produce one set of consensus reference materials (ConRefs) when appropriate certified reference materials from an identified source are absent. Gives the steps to be taken to produce a set of ConRefs for a particular property or family of related properties necessary in semiconductor technology.
| Committee |
F 01
|
| DocumentType |
Guide
|
| Pages |
4
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 This guide covers the procedures for producing a single set of consensus reference materials (ConRefs) in the absence of suitable certified reference materials from an established source.
1.2 This guide covers the steps to be taken to generate a set of ConRefs for a specific property or family of related properties required in semiconductor technology.
1.3 The procedure for generating the set of ConRefs is based on interlaboratory testing in accordance with Practice E691. It is assumed for the purposes of this guide that the test method evaluated by the interlaboratory study (ILS) is appropriate for determining the property values of the ConRef. This guide does not cover the selection of one of several possible test methods nor does it cover the case for which other reference materials must be used in the measurement of the properties of the ConRef.
1.4 This guide also describes procedures that may be used to generate consensus property values that may form the basis for the generation of multiple sets of CRMs or reference materials (RMs).
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