ASTM F 1619 : 1995 : R2000
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Standard Test Method for Measurement of Interstitial Oxygen Content of Silicon Wafers by Infrared Absorption Spectroscopy with p-Polarized Radiation Incident at the Brewster Angle
Hardcopy , PDF
11-11-2014
English
15-09-1995
CONTAINED IN VOL. 10.05, 2001 Determines the absorption coefficient due to the interstitial oxygen content of commercial monocrystalline silicon wafers by means of Fourier transform infrared (FT-IR) spectroscopy. In this test method, the incident radiation is p-polarized and incident on the test specimen at the Brewster angle in order to minimize multiple reflections.
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