ASTM F 2074 : 2000
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers (Withdrawn 2003)
Hardcopy , PDF
05-11-2013
English
10-12-2000
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL. 10.05, 2001 Defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials that contain flats or notches on the periphery.
| Committee |
F 01
|
| DocumentType |
Guide
|
| Pages |
4
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 This guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials that contain flats or notches on the periphery. It was developed for use with silicon wafers with standard diameter and flat positions as given in SEMI Specifications M1.
1.2 It may be applied to other semiconductor wafers if the flat locations are properly taken into account.
1.3 Wafers of any size can be measured provided that suitable test jigs and instruments are available.
1.4 Roundness of wafers cannot be determined from measurements made solely at the positions defined in this guide. No information is provided concerning the diameter of the wafer at points other than those measured.
| SEMI M20 : 2015 | PRACTICE FOR ESTABLISHING A WAFER COORDINATE SYSTEM |
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