ASTM F 390 : 1998 : R2003
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
Hardcopy , PDF
12-08-2020
English
10-05-1998
Important note : Users cannot be edited or removed once added to your Multi user PDF.| Committee |
F 01
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| DocumentType |
Test Method
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| Pages |
0
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| PublisherName |
American Society for Testing and Materials
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| Status |
Superseded
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| Supersedes |
1.1 This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films between 0.01 and 100 [mu]m thick, formed by deposition of a material or by a thinning process and supported by an insulating substrate, in the sheet resistance range from 10 to 10 [omega]/[open-box] (see 3.1.3).
1.2 This test method is suitable for referee measurement purposes as well as for routine acceptance measurements.
1.3 The values stated in Si units are to be regarded as the standard. The values given in parentheses are for information only.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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