ASTM F 390 : 2011 : REDLINE
Current
The latest, up-to-date edition.
Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
English
01-06-2011
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL. 10.04, 2015 Defines the measurement of sheet resistance of metallic thin films with a co-linear four-probe array.
| Committee |
F 01
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| DocumentType |
Redline
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| Pages |
5
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| PublisherName |
American Society for Testing and Materials
|
| Status |
Current
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1.1 This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films between 0.01 and 100 [mu]m thick, formed by deposition of a material or by a thinning process and supported by an insulating substrate, in the sheet resistance range from 10 to 10 [omega]/[open-box] (see 3.1.3).
1.2 This test method is suitable for referee measurement purposes as well as for routine acceptance measurements.
1.3 The values stated in Si units are to be regarded as the standard. The values given in parentheses are for information only.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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| ASTM F 1711 : 1996 : R2002 | Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe |
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| ASTM F 1711 : 1996 | Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe |
| ASTM F 388 : 1984 | Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993) |
| ASTM E 2251 : 2014 : REDLINE | Standard Specification for Liquid-in-Glass ASTM Thermometers with Low-Hazard Precision Liquids |
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