ASTM F 691 : 1980 : R1991 : EDT 1
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Practice for Preparing Photoplates for Measuring Flatness Deviation (Withdrawn 1996)
Available format(s)
Hardcopy , PDF
Superseded date
01-01-2014
Language(s)
English
Published date
01-01-2014
CONTAINED IN VOL 10.05 1997 Gives method for preparing glass photoplates for flatness measurements using dry nitrogen
DevelopmentNote |
Supersedes ASTM F 465 (12/2001)
|
DocumentType |
Standard Practice
|
Pages |
2
|
ProductNote |
e1NOTE-Unit of measurement paragraph added to the Scope and order of sections changed editorially in May 1991.
|
PublisherName |
American Society for Testing and Materials
|
Status |
Superseded
|
Supersedes |
ASTM F 127 : 1984 | Definitions of Terms Relating to Relating to Photomasking Technology for Microelectronics (Withdrawn 1992) |
FED-STD-209 Revision E:1992 | AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES |
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