ASTM F 691 : 1980 : R1991 : EDT 1
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Practice for Preparing Photoplates for Measuring Flatness Deviation (Withdrawn 1996)
Available format(s)
PDF
Language(s)
English
Published date
01-01-2014
Superseded date
01-01-2014
€60.83
Excluding VAT
CONTAINED IN VOL 10.05 1997 Gives method for preparing glass photoplates for flatness measurements using dry nitrogen
| DevelopmentNote |
Supersedes ASTM F 465 (12/2001)
|
| DocumentType |
Standard Practice
|
| Pages |
2
|
| ProductNote |
e1NOTE-Unit of measurement paragraph added to the Scope and order of sections changed editorially in May 1991.
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| Supersedes |
| ASTM F 127 : 1984 | Definitions of Terms Relating to Relating to Photomasking Technology for Microelectronics (Withdrawn 1992) |
| FED-STD-209 Revision E:1992 | Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones (S/S by ISO14644-1 and ISO14644-2) |
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