ASTM F 691 : 1980 : R1991 : EDT 1

Superseded

Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Practice for Preparing Photoplates for Measuring Flatness Deviation (Withdrawn 1996)

Available format(s): Hardcopy, PDF

Superseded date: 01-01-2014

Language(s): English

Published date: 01-01-2014

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CONTAINED IN VOL 10.05 1997 Gives method for preparing glass photoplates for flatness measurements using dry nitrogen

Development Note	Supersedes ASTM F 465 (12/2001)
Document Type	Standard Practice
ISBN
Pages
Product Note	e1NOTE-Unit of measurement paragraph added to the Scope and order of sections changed editorially in May 1991.
Published
Publisher	American Society for Testing and Materials
Status	Superseded
Supersedes	ASTM F 691 : 1980 : R1991

ASTM F 127 : 1984	Definitions of Terms Relating to Relating to Photomasking Technology for Microelectronics (Withdrawn 1992)
FED-STD-209 Revision E:1992	AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES

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CONTAINED IN VOL 10.05 1997 Gives method for preparing glass photoplates for flatness measurements using dry nitrogen

Development Note	Supersedes ASTM F 465 (12/2001)
Document Type	Standard Practice
ISBN
Pages
Product Note	e1NOTE-Unit of measurement paragraph added to the Scope and order of sections changed editorially in May 1991.
Published
Publisher	American Society for Testing and Materials
Status	Superseded
Supersedes	ASTM F 691 : 1980 : R1991

ASTM F 127 : 1984	Definitions of Terms Relating to Relating to Photomasking Technology for Microelectronics (Withdrawn 1992)
FED-STD-209 Revision E:1992	AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES