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ASTM F 804 : 1983 : R1990 : EDT 1
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
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Practice for Producing Spin Coating Resist Thickness Curves (Withdrawn 1997)
Hardcopy , PDF
31-12-1997
English
31-12-2010
CONTAINED IN VOL 10.05 1997 Gives method for producing spin coating thickness curves for radiation-sensitive resists on substrates, wafers, and mask blanks. Applies to thicknesses from submicrometre to several micrometres.
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