ASTM F 804 : 1983 : R1990 : EDT 1
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Practice for Producing Spin Coating Resist Thickness Curves (Withdrawn 1997)
Available format(s)
PDF
Language(s)
English
Published date
31-12-2010
Withdrawn date
31-12-1997
€57.49
Excluding VAT
CONTAINED IN VOL 10.05 1997 Gives method for producing spin coating thickness curves for radiation-sensitive resists on substrates, wafers, and mask blanks. Applies to thicknesses from submicrometre to several micrometres.
| Committee |
F 01
|
| DocumentType |
Standard Practice
|
| Pages |
3
|
| ProductNote |
cr NOTE-Test Method F 907 added to Referenced Document section editoriallv in Julv 1991.
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
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| FED-STD-209 Revision E:1992 | Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones (S/S by ISO14644-1 and ISO14644-2) |
| ASTM F 66 : 1984 : R1990 | Test Methods for Testing Photoresists Used in Microelectronic Fabrication (Withdrawn 1996) |
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