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  • ASTM F 804 : 1983 : R1990 : EDT 1

    Withdrawn A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

    Practice for Producing Spin Coating Resist Thickness Curves (Withdrawn 1997)

    Available format(s):  Hardcopy, PDF

    Withdrawn date:  31-12-1997

    Language(s):  English

    Published date:  31-12-2010

    Publisher:  American Society for Testing and Materials

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    Abstract - (Show below) - (Hide below)

    CONTAINED IN VOL 10.05 1997 Gives method for producing spin coating thickness curves for radiation-sensitive resists on substrates, wafers, and mask blanks. Applies to thicknesses from submicrometre to several micrometres.

    General Product Information - (Show below) - (Hide below)

    Committee F 01
    Document Type Standard Practice
    Product Note cr NOTE-Test Method F 907 added to Referenced Document section editoriallv in Julv 1991.
    Publisher American Society for Testing and Materials
    Status Withdrawn

    Standards Referencing This Book - (Show below) - (Hide below)

    ASTM F 127 : 1984 Definitions of Terms Relating to Relating to Photomasking Technology for Microelectronics (Withdrawn 1992)
    FED-STD-209 Revision E:1992 AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES
    ASTM F 66 : 1984 : R1990 Test Methods for Testing Photoresists Used in Microelectronic Fabrication (Withdrawn 1996)
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