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Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages
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Available format(s): Hardcopy, PDF
Superseded date: 11-11-2014
Language(s): English
Published date: 31-12-2010
Publisher: American Society for Testing and Materials
CONTAINED IN VOL. 10.04, 2009 Covers hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used.
1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.
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