ASTM F 863 : 1984 : R1992 : EDT 1
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Practice for Detection of Defects in Spin-Coated Resist (Withdrawn 1996)
Hardcopy , PDF
01-01-1996
English
31-12-2010
Important note : Users cannot be edited or removed once added to your Multi user PDF.CONTAINED IN VOL 10.05 1997 Detects defects in spin-coated resist on clear substrates used in the evaluation and process control of spin-coating resist systems.
| Committee |
ASTM
|
| DocumentType |
Standard Practice
|
| Pages |
2
|
| ProductNote |
et NOTE-Editorial changes were made throughout in February 1992.
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Withdrawn
|
| FED-STD-209 Revision E:1992 | AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES |
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