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  • ASTM F 863 : 1984 : R1992 : EDT 1

    Withdrawn A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

    Practice for Detection of Defects in Spin-Coated Resist (Withdrawn 1996)

    Available format(s):  Hardcopy, PDF

    Withdrawn date:  01-01-1996

    Language(s):  English

    Published date:  31-12-2010

    Publisher:  American Society for Testing and Materials

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    Abstract - (Show below) - (Hide below)

    CONTAINED IN VOL 10.05 1997 Detects defects in spin-coated resist on clear substrates used in the evaluation and process control of spin-coating resist systems.

    General Product Information - (Show below) - (Hide below)

    Committee ASTM
    Document Type Standard Practice
    Product Note et NOTE-Editorial changes were made throughout in February 1992.
    Publisher American Society for Testing and Materials
    Status Withdrawn

    Standards Referencing This Book - (Show below) - (Hide below)

    FED-STD-209 Revision E:1992 AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES
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