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  • ASTM F 864 : 1984 : R1992

    Withdrawn A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

    Practice for Inspection of Hardsurface Glass Photoplates (Withdrawn 1996)

    Available format(s):  Hardcopy, PDF

    Withdrawn date:  01-01-1996

    Language(s):  English

    Published date:  31-12-2010

    Publisher:  American Society for Testing and Materials

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    Abstract - (Show below) - (Hide below)

    CONTAINED IN VOL 10.05 1997 Describes inspection of hard-surface glass photoplates to produce photomasks for semiconductor and microelectronic device fabrication. Applies to hard photoplates without photoresist. Limited to detecting surface contamination, gross defects, surface scratches and pinholes. Subjective, depends upon equipment used, types and sizes of defects and observer's judgement.

    General Product Information - (Show below) - (Hide below)

    Committee ASTM
    Document Type Standard Practice
    Publisher American Society for Testing and Materials
    Status Withdrawn

    Standards Referencing This Book - (Show below) - (Hide below)

    ASTM F 127 : 1984 Definitions of Terms Relating to Relating to Photomasking Technology for Microelectronics (Withdrawn 1992)
    FED-STD-209 Revision E:1992 AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES
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