ASTM F 890 : 1984 : R1992
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Practice for Determining Pinhole Density in Photoresist Films Used in Microelectronic Device Processing (Withdrawn 1996)
Hardcopy , PDF
01-10-1996
English
31-12-2010
CONTAINED IN VOL 10.05 1997 Outlines method for counting number of pinholes in a photoresist film.
Committee |
ASTM
|
DocumentType |
Standard Practice
|
Pages |
3
|
PublisherName |
American Society for Testing and Materials
|
Status |
Withdrawn
|
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