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Practice for Determining Pinhole Density in Photoresist Films Used in Microelectronic Device Processing (Withdrawn 1996)
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Available format(s): Hardcopy, PDF
Withdrawn date: 01-10-1996
Language(s): English
Published date: 31-12-2010
Publisher: American Society for Testing and Materials
CONTAINED IN VOL 10.05 1997 Outlines method for counting number of pinholes in a photoresist film.
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