ASTM F 95 : 1989 : R2000
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Standard Test Method for Thickness of Lightly Doped Silicon Epitaxial Layers on Heavily Doped Silicon Substrates Using an Infrared Dispersive Spectrophotometer (Withdrawn 2003)
Hardcopy , PDF
05-11-2013
English
01-01-2000
CONTAINED IN VOL. 10.05, 2001 Measures thickness of epitaxial layers of silicon deposited on silicon substrates using dispersive infrared spectrophotometer. Resistivity of substrate must be less than 0.02 cm at 23 deg C and that of layer must be greater than 0.1 cm at 23 deg C.
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