Semiconductor devices. Constant current electromigration test

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-07-2010

Publisher

British Standards Institution

1 Scope
2 Symbols, terms and definitions
3 Background
4 Sample size
5 Test structures
6 Test conditions
7 Failure criteria
8 Data analysis
Bibliography

Defines a method for conventional constant current electromigration testing of metal lines, via string and contacts.

This standard describes a method for conventional constant current electromigration testing of metal lines, via string and contacts.

Committee	EPL/47
DocumentType	Standard
Pages	14
PublisherName	British Standards Institution
Status	Current

Standards	Relationship
IEC 62415:2010	Identical
EN 62415 : 2010	Identical

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BS EN 62415:2010

Semiconductor devices. Constant current electromigration test

Table of Contents

Abstract

Scope

General Product Information

International Equivalents

Category

Subcategory