BS EN ISO 14644-8:2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Cleanrooms and associated controlled environments Classification of air cleanliness by chemical concentration (ACC)
Hardcopy , PDF
13-07-2022
English
28-02-2013
Committee |
LBI/30
|
DevelopmentNote |
Supersedes 04/30112669 DC (09/2006) Supersedes 11/30248115 DC. (03/2013)
|
DocumentType |
Standard
|
Pages |
34
|
PublisherName |
British Standards Institution
|
Status |
Superseded
|
SupersededBy | |
Supersedes |
This part of ISO14644 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.
This part of ISO14644 currently considers only concentrations of air chemical contaminants between 100 and 10−12g/m3 under cleanroom operational conditions.
This part of ISO14644 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.
It is not the intention of this part of ISO14644 to describe the nature of air chemical contaminants.
This part of ISO14644 does not give a classification of surface chemical contamination.
Standards | Relationship |
ONORM EN ISO 14644-8 : 2013 | Identical |
NS EN ISO 14644-8 : 2013 | Identical |
UNE-EN ISO 14644-8:2014 | Identical |
NBN EN ISO 14644-8 : 2013 | Identical |
SN EN ISO 14644-8 : 2013 | Identical |
NF EN ISO 14644-8 : 2013 | Identical |
EN ISO 14644-8:2013 | Identical |
NEN EN ISO 14644-8 : 2013 | Identical |
ISO 14644-8:2013 | Identical |
I.S. EN ISO 14644-8:2013 | Identical |
UNI EN ISO 14644-8 : 2013 | Identical |
DIN EN ISO 14644-8:2013-06 | Identical |
BS 8568:2013 | Cleanroom energy. Code of practice for improving energy efficiency in cleanrooms and clean air devices |
SEMI E45 : NOV 2001(R2007) | TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS) |
SEMI E46 : 2007 | TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS) |
ISO 14644-6:2007 | Cleanrooms and associated controlled environments Part 6: Vocabulary |
ISO 14644-5:2004 | Cleanrooms and associated controlled environments — Part 5: Operations |
ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
IEST G CC035.1 : 2009 | DESIGN CONSIDERATIONS FOR AIRBORNE MOLECULAR CONTAMINATION FILTRATION SYSTEMS IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS |
ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
SEMI F21 : 2016 | CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT LEVELS IN CLEAN ENVIRONMENTS |
IEST RP CC031.2 : 2008 | METHOD FOR CHARACTERIZING OUTGASSED ORGANIC COMPOUNDS FROM CLEANROOM MATERIALS AND COMPONENTS |
SEMI E108 : 2007 | TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY |
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