BS EN ISO 25178-603:2025
Current
The latest, up-to-date edition.
Design and characteristics of non-contact (phase shifting interferometry) instrumentsGeometrical product specifications (GPS). Surface texture: Areal
Hardcopy , PDF
English
28-02-2025
| Committee |
TPR/1
|
| DocumentType |
Standard
|
| Pages |
28
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| Supersedes |
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
| Standards | Relationship |
| EN ISO 25178-603:2025 | Equivalent |
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