BS IEC 62047-29:2017
Current
The latest, up-to-date edition.
Semiconductor devices. Micro-electromechanical devices Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
Hardcopy , PDF
English
15-03-2018
Important note : Users cannot be edited or removed once added to your Multi user PDF.| Committee |
EPL/47
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| DocumentType |
Standard
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| Pages |
16
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| PublisherName |
British Standards Institution
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| Status |
Current
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IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.
| Standards | Relationship |
| IEC 62047-29:2017 | Identical |
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