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BS ISO 13084:2018

Current

Current

The latest, up-to-date edition.

Surface chemical analysis. Secondary ion mass spectrometry. Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

16-11-2018

€231.38
Excluding VAT

Committee
CII/60
DocumentType
Standard
ISBN
9780580974557
Pages
24
PublisherName
British Standards Institution
Status
Current
Supersedes

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

Standards Relationship
ISO 13084:2018 Identical

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