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BS ISO 14291:2012

Current

Current

The latest, up-to-date edition.

Vacuum gauges. Definitions and specifications for quadrupole mass spectrometers

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-08-2012

€217.36
Excluding VAT

Foreword
Introduction
1 Scope
2 Terms and definitions
3 Symbols and abbreviated terms
4 Principle of QMS
5 Specifications for a QMS to be provided
  by manufacturers
6 Optional specifications for QMS to be
  provided by manufacturers
Bibliography

Describes terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.

Committee
MCE/8/-/4
DevelopmentNote
Supersedes 11/30241735 DC. (08/2012)
DocumentType
Standard
Pages
26
PublisherName
British Standards Institution
Status
Current
Supersedes

This International Standard defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.

This International Standard applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically>300. QMSs with other ion sources, such as those of the chemical ionization, photoionization, and field ionization types, as well as the measurements of m/z above 300, which are mainly used to specify organic materials, lie outside the scope of this International Standard.

Standards Relationship
ISO 14291:2012 Identical

ISO 27894:2009 Vacuum technology Vacuum gauges Specifications for hot cathode ionization gauges
ISO 3529-3:2014 Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges
ISO 3753:1977 Vacuum technology — Graphical symbols
ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO 3529-1:1981 Vacuum technology — Vocabulary — Part 1: General terms

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