BS ISO 14644-12:2018
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments Specifications for monitoring air cleanliness by nanoscale particle concentration
Hardcopy , PDF
English
06-09-2018
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
| Committee |
LBI/30
|
| DocumentType |
Standard
|
| ISBN |
9780580957611
|
| Pages |
20
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1microns (100nm) or less – “nanoscale” – are considered.
The monitoring given in this document is for use mainly in “operational” states.
NOTE1 For the purposes of this document, reference is made to “nanoscale particles”, which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE3 Health and safety considerations are excluded from this document.
| Standards | Relationship |
| ISO 14644-12:2018 | Identical |
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