BS ISO 15632:2021
Current
The latest, up-to-date edition.
Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
Hardcopy , PDF
English
22-02-2021
Important note : Users cannot be edited or removed once added to your Multi user PDF.| Committee |
CII/9
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| DocumentType |
Standard
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| Pages |
22
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| PublisherName |
British Standards Institution
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| Status |
Current
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| Supersedes |
This document defines the most important quantities that characterize an energy-dispersive X?ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO22309[ 2] and ASTME1508[ 3] and is outside the scope of this document.
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