BS ISO 16413:2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
Hardcopy , PDF
18-08-2020
English
31-03-2013
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Foreword
Introduction
1 Scope
2 Terms, definitions, symbols and abbreviated terms
3 Instrumental requirements, alignment and
positioning guidelines
4 Data collection and storage
5 Data analysis
6 Information required when reporting XRR analysis
Annex A (informative) - Example of report for an
oxynitrided silicon wafer
Bibliography
Describes a method for the evaluation of thickness, density and interface width of single layer and multilayered thin films which have thicknesses between approximately 1 nm and 1 [mu]m, on flat substrates, by means of X-Ray Reflectometry (XRR).
| Committee |
CII/60
|
| DevelopmentNote |
Supersedes 12/30235353 DC. (03/2013)
|
| DocumentType |
Standard
|
| Pages |
42
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| Standards | Relationship |
| ISO 16413:2013 | Identical |
| ISO/IEC Guide 98-3:2008 | Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) |
| ISO 25178-2:2012 | Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters |
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