BS ISO 16413:2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
Hardcopy , PDF
18-08-2020
English
31-03-2013
Foreword
Introduction
1 Scope
2 Terms, definitions, symbols and abbreviated terms
3 Instrumental requirements, alignment and
positioning guidelines
4 Data collection and storage
5 Data analysis
6 Information required when reporting XRR analysis
Annex A (informative) - Example of report for an
oxynitrided silicon wafer
Bibliography
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