BS ISO 16531:2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Surface chemical analysis. Depth profiling. Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
Hardcopy , PDF
06-10-2020
English
31-05-2013
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions, symbols and abbreviated terms
4 System requirements
5 Ion beam alignment methods
6 When to align and check ion beam alignment
Annex A (informative) - Comparison of AES depth
profiles with good/poor ion beam alignment
Annex B (informative) - Alignment using cup with
co-axial electrodes
Bibliography
Describes methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
| Committee |
CII/60
|
| DevelopmentNote |
Supersedes 12/30241146 DC. (05/2013)
|
| DocumentType |
Standard
|
| Pages |
30
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| Standards | Relationship |
| ISO 16531:2013 | Identical |
| ISO 18115-1:2013 | Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy |
| ISO 14606:2015 | Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials |
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