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BS ISO 17560:2014

Current

Current

The latest, up-to-date edition.

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of boron in silicon

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

30-09-2014

€165.94
Excluding VAT

Foreword
Introduction
1 Scope
2 Normative reference
3 Symbols and abbreviations
4 Principle
5 Reference materials
6 Apparatus
7 Specimen
8 Procedure
9 Expression of results
10 Test report
Annex A (informative) - Statistical report of stylus
        profilometry measurements
Bibliography

Defines a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon, and using stylus profilometry or optical interferometry for depth scale calibration.

Committee
CII/60
DevelopmentNote
Supersedes 99/124265 DC. (09/2002) Supersedes 14/30296416 DC. (09/2014)
DocumentType
Standard
Pages
22
PublisherName
British Standards Institution
Status
Current
Supersedes

This International Standard specifies a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon, and using stylus profilometry or optical interferometry for depth scale calibration. This method is applicable to single-crystal, poly-crystal, or amorphous silicon specimens with boron atomic concentrations between 1×1016atoms/cm3 and 1×1020atoms/cm3, and to crater depths of 50nm or deeper.

Standards Relationship
ISO 17560:2014 Identical

ISO 14237:2010 Surface chemical analysis Secondary-ion mass spectrometry Determination of boron atomic concentration in silicon using uniformly doped materials
ISO 5725-2:1994 Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method

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