Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials

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Hardcopy , PDF

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English

Published date

18-05-2021

Publisher

British Standards Institution

Committee	CII/60
DocumentType	Standard
Pages	14
PublisherName	British Standards Institution
Status	Current
Supersedes	BS ISO 18114:2003

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

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BS ISO 18114:2021

Surface chemical analysis. Secondary-ion mass spectrometry. Determination of relative sensitivity factors from ion-implanted reference materials

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