BS ISO 20263:2017

Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions and abbreviated terms
4 Specimen preparation for cross-sectional imaging
5 Determination of an interface position
6 Detailed procedure for determining the position of
  the interface
7 Uncertainty
Annex A (informative) - Examples of processing the
        real TEM/STEM images for three image types
Annex B (informative) - Two main applications for
        this method
Annex C (informative) - Calibration of scale unit: Pixel
        size calibration
Bibliography

Describes a procedure for the determination of averaged interface position between two different layered materials recorded in the cross-sectional image of the multi-layered materials

This document specifies a procedure for the determination of averaged interface position between two different layered materials recorded in the cross-sectional image of the multi-layered materials. It is not intended to determine the simulated interface of the multi-layered materials expected through the multi-slice simulation (MSS) method. This document is applicable to the cross-sectional images of the multi-layered materials recorded by using a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM) and the cross-sectional elemental mapping images by using an energy dispersive X-ray spectrometer (EDS) or an electron energy loss spectrometer (EELS). This document is also applicable to the digitized image recorded on an image sensor built into a digital camera, a digital memory set in the PC or an imaging plate and the digitalized image converted from an analogue image recorded on the photographic film by an image scanner.