BS ISO 20341:2003
Current
The latest, up-to-date edition.
Surface chemical analysis. Secondary-ion mass spectrometry. Method for estimating depth resolution parameters with multiple delta-layer reference materials
Hardcopy , PDF
English
08-08-2003
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1 Scope
2 Normative references
3 Symbols
4 Requirements for multiple delta-layer reference materials
5 Procedures
6 Test report
Annex A (normative) Simpler options of estimating SIMS depth
resolution parameters
Bibliography
Gives procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
| Committee |
CII/60
|
| DevelopmentNote |
Supersedes 02/122923 DC (08/2003) Reviewed and confirmed by BSI, January 2010. (12/2009)
|
| DocumentType |
Standard
|
| Pages |
14
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| Supersedes |
This part of ISO3262 specifies the requirements and the corresponding methods of test for natural quartz (ground).
| Standards | Relationship |
| ISO 20341:2003 | Identical |
| ISO 18115:2001 | Surface chemical analysis Vocabulary |
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