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BS ISO 20341:2003

Current

Current

The latest, up-to-date edition.

Surface chemical analysis. Secondary-ion mass spectrometry. Method for estimating depth resolution parameters with multiple delta-layer reference materials

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

08-08-2003

1 Scope
2 Normative references
3 Symbols
4 Requirements for multiple delta-layer reference materials
5 Procedures
6 Test report
Annex A (normative) Simpler options of estimating SIMS depth
        resolution parameters
Bibliography

Gives procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

Committee
CII/60
DevelopmentNote
Supersedes 02/122923 DC (08/2003) Reviewed and confirmed by BSI, January 2010. (12/2009)
DocumentType
Standard
Pages
14
PublisherName
British Standards Institution
Status
Current
Supersedes

This part of ISO3262 specifies the requirements and the corresponding methods of test for natural quartz (ground).

Standards Relationship
ISO 20341:2003 Identical

ISO 18115:2001 Surface chemical analysis Vocabulary

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