BS ISO 21270:2004

Foreword
Introduction
1 Scope
2 Normative reference
3 Symbols
4 Outline of the methods
5 When to use this International Standard
6 Procedure for evaluating the intensity linearity
  6.1 The samples
  6.2 Preparing the copper sample
  6.3 Preparing the stainless-steel sample or sample
       holder
  6.4 Choosing the spectrometer settings for which the
       intensity linearity measurement is required
  6.5 Operating the instrument
  6.6 Measurement of the intensity scale linearity by
       varying the source flux
  6.7 Determination of the intensity scale linearity
       by varying the source flux
  6.8 Measurement of the intensity scale linearity in
       XPS using the spectrum ratio method for systems
       with two or more but less than 30 X-ray source
       emission current settings
  6.9 Determination of the intensity scale linearity in
       XPS using the spectrum ratio method for systems
       with two or more but less than 30 X-ray source
       emission current settings
  6.10 Completing the analysis
Annex A (informative) Example results of linearity measurements
                      using the spectrum ratio method
                      (the second method)
Bibliography

Defines two methods for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale of Auger and X-ray photoelectron spectrometers. Also includes methods to correct for intensity non-linearities so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction equations have been shown to be valid.

This International Standard specifies two methods for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale of Auger and X-ray photoelectron spectrometers. It also includes methods to correct for intensity non-linearities so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction equations have been shown to be valid.